Effect of oxygen intercalation on properties of sputtered CuYO2 for potential use as �?-type transparent conducting films

Bulletin of materials science

M K Jayaraj¹  R Manoj²  K A Vanaja¹  M Nisha¹ 

[1] Department of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$Department of Physics, Cochin University of Science and Technology, Kochi 682 022, IndiaDepartment of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$;ENEA, Portici Research Centre, 80055 Portici, Naples, Italy$$ENEA, Portici Research Centre, 80055 Portici, Naples, ItalyENEA, Portici Research Centre, 80055 Portici, Naples, Italy$$

关键词: Transparent conducting oxide;    RF sputtering;    ð‘�?-type TCO.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Transparent films of copper yttrium oxide doped with 2% calcium have been prepared by rf magnetron sputtering. The films show a conductivity of 8 Scm^-1 on intercalation of oxygen at high pressure, which reduced the transparency in the visible region. The Ca-doped CuYO₂ films before oxygen intercalation show an average transmission of about 60% which reduces to about 45% upon oxygen intercalation. The temperature dependence of the conductivity indicates semiconductor behaviour with low activation energy of 0.59 eV at room temperature. The positive sign of Seebeck coefficient (+274 𝜇VK^-1) confirms the ð‘�?-type conductivity of the films. The optical bandgap of CuYO₂ was found to be 3.15 eV.

【 授权许可】

Unknown