Micromachining of AlN and Al2O3 Using Fiber Laser

Micromachines

Benedikt Adelmann¹  Florian Preusch¹  Ralf Hellmann¹ 

[1] Applied Laser and Phonics Group, University of Applied Sciences Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany;

关键词: ceramics;    Al2O3;    AlN;    micromachining;    fiber laser;   

DOI  :  10.3390/mi5041051

来源: DOAJ

【 摘 要 】

We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%). A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%). In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.

【 授权许可】

Unknown