期刊论文详细信息
Sensors | |
Self-Calibrated Humidity Sensor in CMOS without Post-Processing | |
关键词: capacitive sensors; microsensors; humidity measurement; CMOS integrated circuits; | |
DOI : 10.3390/s120100226 | |
来源: DOAJ |
【 摘 要 】
A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.
【 授权许可】
Unknown