Self-Calibrated Humidity Sensor in CMOS without Post-Processing

Sensors

Oleg Nizhnik¹  Kohei Higuchi¹ 

[1] Maenaka Human-sensing Fusion Project, 8111, Shosha 2167, Himeji-shi, Hyogo-ken, Japan; E-Mail:

关键词: capacitive sensors;    microsensors;    humidity measurement;    CMOS integrated circuits;   

DOI  :  10.3390/s120100226

来源: mdpi

【 摘 要 】

A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland