The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Sensors

Zhiwei Kou¹  Dan Zhi¹  Huiliang Cao¹  Zongmin Ma¹  Zhicai Yang¹  Yunbo Shi¹  Jun Liu¹  Hengzhen Feng¹  Yanxiang Chen¹ 

[1] Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China;

关键词: dual-warhead Hopkinson bar;    laser interferometer;    dynamic linearity;    accelerometer;    measurement;   

DOI  :  10.3390/s16060840

来源: DOAJ

【 摘 要 】

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method.

【 授权许可】

Unknown