Effect of Target Sintering Temperature on the Morphological and Optical Properties of Pulsed Laser Deposited TiO2 Thin Films

Coatings

Silviu Gurlui¹  Mohamed Adnane²  Laid Kadri²  Stoian George³  Corneliu Doroftei⁴  Liviu Leontie⁴  Georgiana Bulai⁴  Aurelian Carlescu⁴ 

[1] LOA-SL, Faculty of Physics, AlexandruIoan Cuza University of Iasi, Bulevardul Carol I, Nr. 11, 700506 Iasi, Romania;Laboratoire de Microscopie Electronique et Sciences des Matériaux (LMESM), Département de Technologie des Matériaux, Faculté de Physique, Université des Sciences et de la Technologie d’Oran Mohamed Boudiaf (USTO-MB), El M’naouar BP 1505, Bir El Djir, Oran 31000, Algeria;National Institute of Research and Development for Technical Physics, 47 Mangeron Boulevard, 700050 Iasi, Romania;Science Research Department, Institute of Interdisciplinary Research, Research Center in Environmental Sciences for the North-Eastern Romanian Region (CERNESIM), AlexandruIoan Cuza University of Iasi, Bulevardul Carol I, Nr. 11, 700506 Iasi, Romania;

关键词: TiO₂;    thin films;    amorphous;    PLD;    target;    sintering;   

DOI  :  10.3390/coatings11050561

来源: DOAJ

【 摘 要 】

In this paper, we report on the effect of titanium dioxide (TiO₂) target sintering temperature on the morphological and optical properties of amorphous titanium dioxide thin films synthesized by pulsed laser deposition (PLD) on indium tin oxide (ITO) glass substrate and subsequently heat-treated in air at low temperature (150 °C). Three types of targets were used, unsintered (pressed at room temperature), sintered at 500 °C and sintered at 1000 °C. The surface morphology of the samples was investigated by scanning electron microscopy (SEM), and profilometry was used for thickness measurements. The structural properties of the films were examined by X-ray diffraction (XRD), while their optical properties were studied by UV‒vis spectroscopy. The obtained TiO₂ thin films have an amorphous nature, as shown by XRD analysis. Profilometer showed that sintered target samples have more reliable thicknesses than unsintered ones. The SEM studies revealed the sufficient structural homogeneity of sintered target nanosized TiO₂ films and agglomerates in the case of unsintered target film. The UV‒vis transmittance spectra showed high transparency in the visible range of PLD films, proportional to the target sintering temperature. The optical band gaps of the films deposited using the 500 °C and 1000 °C sintered targets are closer to those of anatase and rutile phases, respectively, which provides a promising approach to the challenges of amorphous TiO₂-based nanostructures.

【 授权许可】

Unknown