Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser

Nanotechnology Reviews

卷:9

Nee Chen Hon¹  Ong Guang Liang¹  Ong Teng Sian¹  Leong Chern Yang¹  Yap Seong Shan¹  Tou Teck Yong¹  Yap Seong Ling²  Chin Yoong Tatt³  Lee Siaw Foon⁴ 

[1] Faculty of Engineering, Multimedia University, Jalan Multimedia, 63100, Cyberjaya, Selangor, Malaysia;

[2] Plasma Technology Research Centre, Department of Physics, Faculty of Science, University of Malaya, 50603, Kuala Lumpur, Malaysia;

[3] SanDisk Storage Malaysia Sdn, Bhd, Batu Kawan, 14100, Penang, Malaysia;

[4] Spanish National Research Council, Eduardo Torroja Institute for Construction Science (IETcc-CSIC), Madrid, Spain;

关键词: ito;    laser processing;    transparent conducting oxide;   

DOI  :  10.1515/ntrev-2020-0115

来源: DOAJ

【 摘 要 】

Indium tin oxide (ITO) is the most important transparent conducting electrode to date and the candidate for ultrafast signal processing in telecommunication region. ITO is normally selectively removed in a multiple-steps process for device application. In this work, we aimed to study single pulse removal of ITO-coated glass and PET by using a nanosecond (ns) laser (266 nm) and a femtosecond (fs) laser (1,025 nm) where each process is dominated by either linear or nonlinear process. For ns laser, ITO was removed from PET substrate at 0.01 J/cm2. Detachment likely occurred via thermal-induced process because of the high absorption by both ITO and PET and the thermomechanical properties of PET. At higher laser fluence (∼0.04 J/cm2), the ITO films on both substrates were damaged, and at 1.34 J/cm2, ITO was ablated from the glass substrate. For fs laser removal via nonlinear process, ITO was removed from PET substrate at 0.3 J/cm2, but at 0.8 J/cm2, the PET substrate was also modified. ITO layer was partially removed from glass substrate by fs laser pulse at 0.3 J/cm2 and full removal only occurred at 1.7 J/cm2. Thus, the fluence range for single fs pulse removal of ITO/PET was 0.3–0.8 J/cm2 and >1.7 J/cm2 for ITO/glass.

【 授权许可】

Unknown