Nanotechnology Reviews | 卷:9 |
Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser | |
Nee Chen Hon1  Ong Guang Liang1  Ong Teng Sian1  Leong Chern Yang1  Yap Seong Shan1  Tou Teck Yong1  Yap Seong Ling2  Chin Yoong Tatt3  Lee Siaw Foon4  | |
[1] Faculty of Engineering, Multimedia University, Jalan Multimedia, 63100, Cyberjaya, Selangor, Malaysia; | |
[2] Plasma Technology Research Centre, Department of Physics, Faculty of Science, University of Malaya, 50603, Kuala Lumpur, Malaysia; | |
[3] SanDisk Storage Malaysia Sdn, Bhd, Batu Kawan, 14100, Penang, Malaysia; | |
[4] Spanish National Research Council, Eduardo Torroja Institute for Construction Science (IETcc-CSIC), Madrid, Spain; | |
关键词: ito; laser processing; transparent conducting oxide; | |
DOI : 10.1515/ntrev-2020-0115 | |
来源: DOAJ |
【 摘 要 】
Indium tin oxide (ITO) is the most important transparent conducting electrode to date and the candidate for ultrafast signal processing in telecommunication region. ITO is normally selectively removed in a multiple-steps process for device application. In this work, we aimed to study single pulse removal of ITO-coated glass and PET by using a nanosecond (ns) laser (266 nm) and a femtosecond (fs) laser (1,025 nm) where each process is dominated by either linear or nonlinear process. For ns laser, ITO was removed from PET substrate at 0.01 J/cm2. Detachment likely occurred via thermal-induced process because of the high absorption by both ITO and PET and the thermomechanical properties of PET. At higher laser fluence (∼0.04 J/cm2), the ITO films on both substrates were damaged, and at 1.34 J/cm2, ITO was ablated from the glass substrate. For fs laser removal via nonlinear process, ITO was removed from PET substrate at 0.3 J/cm2, but at 0.8 J/cm2, the PET substrate was also modified. ITO layer was partially removed from glass substrate by fs laser pulse at 0.3 J/cm2 and full removal only occurred at 1.7 J/cm2. Thus, the fluence range for single fs pulse removal of ITO/PET was 0.3–0.8 J/cm2 and >1.7 J/cm2 for ITO/glass.
【 授权许可】
Unknown