Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser

Nanotechnology Reviews

article

Chern Yang Leong¹  Seong Shan Yap¹  Guang Liang Ong¹  Teng Sian Ong¹  Seong Ling Yap²  Yoong Tatt Chin³  Siaw Foon Lee⁴  Teck Yong Tou¹  Chen Hon Nee¹ 

[1] Faculty of Engineering, Multimedia University;Plasma Technology Research Centre, Department of Physics, Faculty of Science, University of Malaya;SanDisk Storage Malaysia Sdn;Spanish National Research Council, Eduardo Torroja Institute for Construction Science (IETcc-CSIC)

关键词: ITO;    laser processing;    transparent conducting oxide;   

DOI  :  10.1515/ntrev-2020-0115

学科分类：社会科学、人文和艺术（综合）

来源: De Gruyter

【 摘 要 】

Indium tin oxide (ITO) is the most important transparent conducting electrode to date and the candidate for ultrafast signal processing in telecommunication region. ITO is normally selectively removed in a multiple-steps process for device application. In this work, we aimed to study single pulse removal of ITO-coated glass and PET by using a nanosecond (ns) laser (266 nm) and a femtosecond (fs) laser (1,025 nm) where each process is dominated by either linear or nonlinear process. For ns laser, ITO was removed from PET substrate at 0.01 J/cm 2 . Detachment likely occurred via thermal-induced process because of the high absorption by both ITO and PET and the thermomechanical properties of PET. At higher laser fluence (∼0.04 J/cm 2 ), the ITO films on both substrates were damaged, and at 1.34 J/cm 2 , ITO was ablated from the glass substrate. For fs laser removal via nonlinear process, ITO was removed from PET substrate at 0.3 J/cm 2 , but at 0.8 J/cm 2 , the PET substrate was also modified. ITO layer was partially removed from glass substrate by fs laser pulse at 0.3 J/cm 2 and full removal only occurred at 1.7 J/cm 2 . Thus, the fluence range for single fs pulse removal of ITO/PET was 0.3–0.8 J/cm 2 and >1.7 J/cm 2 for ITO/glass.

【 授权许可】

CC BY