Sensors | 卷:20 |
Mode Analysis of Pt/LGS Surface Acoustic Wave Devices | |
Weipeng Xuan1  Lin Shi2  Hao Jin2  Jikui Luo2  Shuyi Huang2  Shurong Dong2  Hongsheng Xu2  Xinyu Song2  Jinkai Chen3  | |
[1] Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 310018, China; | |
[2] Key Laboratory of Advanced Micro/Nano Electronic Devices & Smart Systems of Zhejiang, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China; | |
[3] Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China; | |
关键词: surface acoustic wave; langasite; mode analysis; platinum; velocity dispersion; | |
DOI : 10.3390/s20247111 | |
来源: DOAJ |
【 摘 要 】
Platinum (Pt) gratings on langasite (LGS) substrates are a widely used structures in high temperature surface acoustic wave (SAW) devices. Multiple modes can be excited in Pt
【 授权许可】
Unknown