Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing

Sensors

David W. Greve¹  Tao-Lun Chin¹  Peng Zheng¹  Paul Ohodnicki¹  John Baltrus¹ 

[1] National Energy Technology Laboratory, Pittsburgh, PA 15236, USA; E-Mails:

关键词: surface acoustic wave;    gas sensor;    oxygen;    langasite;    zinc oxide;    tin oxide;   

DOI  :  10.3390/s130606910

来源: mdpi

【 摘 要 】

Langasite surface acoustic wave devices can be used to implement harsh-environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.