Analytical studies on amplitude change enhancement in coupled aluminium nitride coated single crystal silicon oscillator pair applicable to ultra-sensitive resonating microfluidic flowmeters

Micro & nano letters

article

Dong F. Wang¹  Keisuke Chatani¹  Kenji Kozuka¹  Tsuyoshi Ikehara²  Ryutaro Maeda² 

[1] Micro Engineering and Micro Systems Laboratory, Department of Mechanical Engineering, Faculty of Engineering, Ibaraki University;Research Center for Ubiquitous MEMS & Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)

关键词: aluminium compounds;    elemental semiconductors;    flow sensors;    flowmeters;    microfluidics;    micromechanical resonators;    microsensors;    oscillators;    sensor arrays;    silicon;    vibrations;    amplitude change enhancement;    coupled aluminium nitride coated single crystal silicon oscillator pair;    ultrasensitive resonating microfluidic flowmeters;    vibration mode localisation;    arrays;    micromechanically coupled nearly identical beam-shaped resonators;    ultrasensitive resonating-based flow meters;    eigenstate shifts;    small mass perturbation;    external force;    fluid flow velocity;    symmetrical design;    coupled aluminium nitride coated single crystal silicon resonators;    resonance frequency;    highly sensitive resonating-based flow sensors;    pressure 100 Pa;    AlN-Si;   

DOI  :  10.1049/mnl.2013.0337

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Background & Aim: Pain is one of the common problems in intensive care units (ICUs), and is considered a major clinical challenge due to its high prevalence and unwanted effects on morbidity if left uncontrolled. This study was conducted with the aim to critically appraise pain management templates and their effect on clinical outcomes for patients admitted to adult ICUs.

【 授权许可】

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