Improving metal/ n -Ge ohmic contact by inserting TiO 2 deposited by PEALD

Micro & nano letters

article

Yi Zhang¹  Yan Liu¹  Genquan Han¹  Huan Liu¹  Yue Hao¹ 

[1] Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, School of Microelectronics, Xidian University

关键词: aluminium;    germanium;    titanium compounds;    germanium compounds;    elemental semiconductors;    plasma materials processing;    atomic layer deposition;    ohmic contacts;    semiconductor-metal boundaries;    transmission electron microscopy;    current density;    X-ray photoelectron spectra;    valence bands;    passivation;    vacancies (crystal);    tunnelling;    contact resistance;    MIS structures;    ohmic contact;    PEALD;    plasma-enhanced atomic layer deposition;    titanium dioxide;    cross-sectional transmission electron microscopy;    current densities;    X-ray photoelectron spectroscopy;    XPS;    valence state;    passivation;    oxygen vacancies;    tunnelling resistance;    contact resistivity;    MIS structures;    voltage -0.1 V;    Al-TiO2-GeOx-Ge;    Ge;   

DOI  :  10.1049/mnl.2017.0776

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

A 15-year-old male athletic student was referred to our hospital with an abnormal shadow found on a routine chest X-ray.  A preoperative clinical diagnosis of neurogenic tumor was suspected.  The patient underwent total resection of the tumor through thoracoscopic surgery using four 12-mm instrument ports in order to spare the muscle and chest wall.  Bleeding increased just after dissection of the parietal pleura surrounding the tumor.  Hence, the intercostal arteries and veins, which are potential blood supply and drainage vessels of the tumor, were ligated with part of intercostal nerves before removing the tumor, and then the tumor was completely excised with the surrounding soft tissues.  The microscopic features were characteristic of the hyaline vascular type lesions seen in Castleman’s disease.  Profuse bleeding is often reported during resection of the tumor originated from posterior mediastinum.  The present case provides the first report that thoracoscopic surgery is technically feasible and can be performed safely and successfully for the treatment of Castleman’s disease in the posterior mediastinum.

【 授权许可】

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