PDMS-based hot embossing method of fabricating SU-8 photoresist conical nozzle for inkjet print-head

Micro & nano letters

article

Shixia Yan¹  Xing Wang¹  Kehong Li²  Fengwei Wang¹  Ran Guo¹  Helin Zou¹ 

[1] Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology;Faculty of Electronic Information and Electrical Engineering, Dalian University

关键词: embossing;    nozzles;    spin coating;    photoresists;    polymers;    moulding;    hydrophobicity;    ink jet printers;    PDMS-based hot embossing method;    SU-8 photoresist conical nozzle;    inkjet print-head;    mass-produced fabrication;    soft PDMS moulds;    SU-8 master mould;    embossing pressure;    embossing temperature;    embossing time;    SU-8 conical nozzle plate;    trimethyldichlorosilane;    TMCS;    imprinting parameters;    size 56.95 mum to 60.05 mum;    temperature 80.0 degC;    pressure 2.57 MPa;    time 6.0 min;   

DOI  :  10.1049/mnl.2019.0696

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

This work reports a PDMS-based hot embossing technique. The proposed method enables rapid, low-cost and mass-produced fabrication of SU-8 photoresist conical nozzle for inkjet print-head with soft PDMS moulds. The hydrophobic time for SU-8 master mould treated by trimethyldichlorosilane (TMCS) was determined. And the optimised thickness of SU-8 photoresist before hot embossing was 58.5 ± 1.55 μm corresponding to 3750 r/min of spin coating speed. The imprinting parameters were investigated. The highest replication precision was obtained in the embossed SU-8 conical nozzle processed by an embossing pressure of 2.57 MPa, an embossing temperature of 80°C, and an embossing time of 6 min. Finally, this work presents the fabrication of the SU-8 conical nozzle plate with the large aperture of 40.01 ± 1.24 μm, small aperture of 27.12 ± 1.07 μm, and the nozzle height of 50 ± 1.26 μm.

【 授权许可】

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