Design of double-layer SiN x :H film and its application in c-Si PERC solar cells

Micro & nano letters

article

Fan Jinxing¹  Wang Yin¹  Zhou Hongping¹  Xu Linyun¹  Yang Yanhua¹ 

[1] College of Mechanical and Elcetronic Engineering, Nanjing Forestry University

关键词: antireflection coatings;    elemental semiconductors;    refractive index;    plasma CVD;    passivation;    silicon;    carrier lifetime;    solar cells;    semiconductor thin films;    double-layer films;    single crystal silicon solar cells;    single layer film devices;    film passivation performance;    antireflection film technology;    light trapping;    refractive index;    light absorption;    minority carrier lifetime;    energy conversion efficiency;    PECVD;    PERC;    time 137.0 mus;    Si;   

DOI  :  10.1049/mnl.2020.0175

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

The existing solar cell anti-reflection film technology still cannot adequately meet the light trapping needs of solar cells. In this Letter, double-layered SiN x :H films were prepared for c-Si solar cells by plasma enhanced chemical vapor deposition (PECVD). Herein, the authors introduce a simple, convenient method to lower the reflectance in silicon solar cells by applying double-layered SiN x :H film to increase the refractive index of such film. Compared to the single layer film devices, the reflectance of the double-layered SiN x :H film can be significantly reduced by >30% through enhanced absorption of light in solar cells. This method has achieved an average of 0.08% conversion efficiency, with the highest being 0.18%. In addition, the double-layer film solar cells also showed a better passivation performance than that of the single-layer film, so that the minority carrier lifetime was up to 137 µs. Therefore, the improvement of solar cell efficiency mainly come from the decrease of reflectivity and the improvement in film passivation performance. The work of this Letter demonstrated the light trapping advantages and passivation enhancement performance of double-layer films applied to single crystal silicon solar cells.

【 授权许可】

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