Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning

Nanoscale Research Letters

Magnus Willander¹  Omer Nur¹  Ebrahim Chalangar²  Håkan Pettersson³  Anders Gustafsson⁴ 

[1] Department of Science and Technology, Physics, Electronics and Mathematics, Linköping University, Norrköping, Sweden;Department of Science and Technology, Physics, Electronics and Mathematics, Linköping University, Norrköping, Sweden;School of Information Technology, Halmstad University, 301 18, Halmstad, Sweden;Department of Science and Technology, Physics, Electronics and Mathematics, Linköping University, Norrköping, Sweden;School of Information Technology, Halmstad University, 301 18, Halmstad, Sweden;Solid State Physics and NanoLund, Lund University, Box 118, 221 00, Lund, Sweden;Solid State Physics and NanoLund, Lund University, Box 118, 221 00, Lund, Sweden;

关键词: Zinc oxide;    Nanorod arrays;    Vertical growth;    Colloidal lithography;    Nanofabrication;    Sol-gel;    Seed layer;    Chemical bath deposition;   

DOI  :  10.1186/s11671-021-03500-7

来源: Springer

【 摘 要 】

Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.

【 授权许可】

CC BY