The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

Sensors

Zheng Jiao¹  Minghong Wu¹  Zheng Qin¹  Minghua Lu¹ 

[1] Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800, P.R.China

关键词: Thin film;    spray pyrolysis;    Gas sensor;    ITO;   

DOI  :  10.3390/s30800285

来源: mdpi

【 摘 要 】

In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

【 授权许可】

CC BY   
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.