期刊论文详细信息
American Journal of Applied Sciences | |
Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique | Science Publications | |
Tohid Ganj1  Seyed M. Rozati1  | |
关键词: In2O3: Sn; spray pyrolysis; TCO; ITO; | |
DOI : 10.3844/ajassp.2005.1106.1108 | |
学科分类:自然科学(综合) | |
来源: Science Publications | |
【 摘 要 】
Highly conductive transparent In2O3:Sn (ITO) thin films were prepared onto glass substrate using the spray pyrolysis technique. It is observed that these films are polycrystalline with the preferred orientation of [400]. The extent of this orientation increases with substrate temperature. The results show that films with a sheet resistance as low as 35?/cm2 and with a transmittance as high as 90% in visible range can be achieved by controlling the substrate temperature and other preparation process.
【 授权许可】
Unknown
【 预 览 】
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