Characterization of Transparent Conductive Thin Films of In2O3:Sn by Spray Pyrolysis Technique | Science Publications

American Journal of Applied Sciences

Tohid Ganj¹  Seyed M. Rozati¹ 

关键词: In2O3: Sn;    spray pyrolysis;    TCO;    ITO;   

DOI  :  10.3844/ajassp.2005.1106.1108

学科分类：自然科学（综合）

来源: Science Publications

【 摘 要 】

Highly conductive transparent In₂O₃:Sn (ITO) thin films were prepared onto glass substrate using the spray pyrolysis technique. It is observed that these films are polycrystalline with the preferred orientation of [400]. The extent of this orientation increases with substrate temperature. The results show that films with a sheet resistance as low as 35?/cm² and with a transmittance as high as 90% in visible range can be achieved by controlling the substrate temperature and other preparation process.

【 授权许可】

Unknown