ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

Sensors

Shih Min Chou¹  Lay Gaik Teoh²  Wei Hao Lai¹  Yen Hsun Su¹ 

[1] Department of Materials Science and Engineering, National Cheng Kung University, No. 1, Ta-Hsueh Road, Tainan 70101, Taiwan;Department of Mechanical Engineering, National Pingtung University of Science and Technology, No. 1, Shuehfu Road, Neipu, Pingtung 91201, Taiwan

关键词: ZnO:Al;    sputtering;    ethanol gas sensor;    thin films;   

DOI  :  10.3390/s6101420

来源: mdpi

【 摘 要 】

The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrate using Pt as interdigitated electrodes. The structure was characterized by XRD and SEM analyses, and the ethanol vapor gas sensing as well as electrical properties have been investigated and discussed. The gas sensing results show that the sensitivity for detecting 400 ppm ethanol vapor was ∼20 at an operating temperature of 250°C. The high sensitivity, fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetron sputtering can be used for ethanol vapor gas sensing.

【 授权许可】

Unknown   
© 2006 by MDPI (http://www.mdpi.org).