Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

Sensors

Niels Quack¹  Stefan Blunier¹  Jurg Dual¹  Ferdinand Felder²  Martin Arnold² 

[1] Institute of Mechanical Systems, Department of Mechanical and Process Engineering, ETH Zurich. Center of Mechanics, Tannenstrasse 3, ETH Zentrum CLA J35, CH-8092 Zürich, Switzerland; Phone: [phone], Fax: [phone]; E-mail:;Thin Film Physics Group, Technopark, ETH-Trakt PFA J25, Technoparkstrasse 1, CH-8005 Zürich, Switzerland. Phone: [phone], Fax: [phone]; E-mail:

关键词: RCED;    MEMS;    micromirror;    Fabry-Perot;    mid infrared;    micro spectrometer;   

DOI  :  10.3390/s8095466

来源: mdpi

【 摘 要 】

Mid-infrared detectors that are sensitive only in a tunable narrow spectral band are presented. They are based on the Resonant Cavity Enhanced Detector (RCED) principle and employing a thin active region using IV-VI narrow gap semiconductor layers. A Fabry-Pérot cavity is formed by two mirrors. The active layer is grown onto one mirror, while the second mirror can be displaced. This changes the cavity length thus shifting the resonances where the detector is sensitive. Using electrostatically actuated MEMS micromirrors, a very compact tunable detector system has been fabricated. Mirror movements of more than 3 μm at 30V are obtained. With these mirrors, detectors with a wavelength tuning range of about 0.7 μm have been realized. Single detectors can be used in mid-infrared micro spectrometers, while a detector arrangement in an array makes it possible to realize Adaptive Focal Plane Arrays (AFPA).

【 授权许可】

CC BY   
© 2008 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.