Segmented Control of Electrostatically Actuated Bimorph Beams

Proceedings

Waggoner, Kullen¹ 

关键词: MEMS;    electrostatic actuator;    micromirror;    bimorph;   

DOI  :  10.3390/proceedings1040306

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and deflection measurements can be difficult to achieve. Through using segmented bias channels of doped polysilicon, modeling shows it is possible to control and measure different segments of the actuation arm, thus controlling the amount of tip, tilt, or piston deflection. This paper discusses current and future designs, along with test procedures and modeling results.

【 授权许可】

CC BY