Nanoparticle Thin Films for Gas Sensors Prepared by Matrix Assisted Pulsed Laser Evaporation

Sensors

Anna Paola Caricato¹  Armando Luches¹ 

[1] University of Salento, Department of Physics, Via Arnesano, 73100 Lecce, Italy; E-Mail:

关键词: Nanoparticles;    thin films;    MAPLE;    gas sensors;   

DOI  :  10.3390/s90402682

来源: mdpi

【 摘 要 】

The matrix assisted pulsed laser evaporation (MAPLE) technique has been used for the deposition of metal dioxide (TiO₂, SnO₂) nanoparticle thin films for gas sensor applications. For this purpose, colloidal metal dioxide nanoparticles were diluted in volatile solvents, the solution was frozen at the liquid nitrogen temperature and irradiated with a pulsed excimer laser. The dioxide nanoparticles were deposited on Si and Al₂O₃ substrates. A rather uniform distribution of TiO₂ nanoparticles with an average size of about 10 nm and of SnO₂ nanoparticles with an average size of about 3 nm was obtained, as demonstrated by high resolution scanning electron microscopy (SEM-FEG) inspections. Gas-sensing devices based on the resistive transduction mechanism were fabricated by depositing the nanoparticle thin films onto suitable rough alumina substrates equipped with interdigitated electrical contacts and heating elements. Electrical characterization measurements were carried out in controlled environment. The results of the gas-sensing tests towards low concentrations of ethanol and acetone vapors are reported. Typical gas sensor parameters (gas responses, response/recovery time, sensitivity, and low detection limit) towards ethanol and acetone are presented.

【 授权许可】

CC BY   
© 2009 by the authors; licensee MDPI, Basel, Switzerland