Novel Principle of Contactless Gauge Block Calibration

Sensors

Zdeněk Buchta¹  Šimon ᖎřucha²  Bᖞtislav Mikel²  Martin Čí៮k²  Josef Lazar² 

[1] Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, 612 64 Brno, Czech Republic;

关键词: low-coherence interferometry;    gauge block;    nanometrology;   

DOI  :  10.3390/s120303350

来源: mdpi

【 摘 要 】

In this paper, a novel principle of contactless gauge block calibration is presented. The principle of contactless gauge block calibration combines low-coherence interferometry and laser interferometry. An experimental setup combines Dowell interferometer and Michelson interferometer to ensure a gauge block length determination with direct traceability to the primary length standard. By monitoring both gauge block sides with a digital camera gauge block 3D surface measurements are possible too. The principle presented is protected by the Czech national patent No. 302948.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland