Active Angular Alignment of Gauge Blocks in Double-Ended Interferometers

Sensors

Zdeněk Buchta¹  Šimon ᖎřucha²  Vผlav Hucl²  Martin Čí៮k²  Martin ᘊrbort²  Josef Lazar² 

[1] Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic;

关键词: low-coherence interferometry;    gauge block;    metrology;   

DOI  :  10.3390/s131013090

来源: mdpi

【 摘 要 】

This paper presents a method implemented in a system for automatic contactless calibration of gauge blocks designed at ISI ASCR. The system combines low-coherence interferometry and laser interferometry, where the first identifies the gauge block sides position and the second one measures the gauge block length itself. A crucial part of the system is the algorithm for gauge block alignment to the measuring beam which is able to compensate the gauge block lateral and longitudinal tilt up to 0.141 mrad. The algorithm is also important for the gauge block position monitoring during its length measurement.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.