Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Metrology and Measurement Systems

Leszek Salbut¹  Michal Wengierow¹  Zbigniew Ramotowski¹  Robert Szumski¹  Ksawery Szykiedans¹ 

关键词: gauge block;    multi-wavelength;    interferometry;   

DOI  :  10.2478/mms-2013-0041

来源: Versita

【 摘 要 】

This paper shows the result of work of the Institute of Micromechanics and Photonics at Warsaw University of Technology and the Length and Angle Division of Central Office of Measures (GUM) [1] in building an automatic multiwavelength interferometric system with extended measurement range for calibration of long (up to 1 m) gauge blocks. The design of a full working setup with environmental condition control and monitoring systems, as well as image analysis software, is presented. For length deviation determination the phase fraction approach is proposed and described. To confirm that the system is capable of calibrating gauge blocks with assumed accuracy, a comparison between the results of 300 mm length gauge block measurement obtained by using other systems from the Central Office of Measures is made. Statistical analysis proved that the system can be used for high precision measurements with assumed standard uncertainty (125 nm for a length of 1 m). Finally the comparison between our results obtained for a long gauge block set (600 mm to 1000 mm long) and previous calibrations made by the Physikalisch-Technische Bundesanstalt (PTB) [2] is shown

【 授权许可】

Unknown