Mechanical Vibrations of Thermally Actuated Silicon Membranes

Micromachines

Ivan Puchades¹  Mustafa Koz² 

[1] Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA;Microsystems Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA;

关键词: MEMS;    thermal actuation;    thermal vibration;    vibration mode;   

DOI  :  10.3390/mi3020255

来源: mdpi

【 摘 要 】

A thermally-actuated micro-electro-mechanical (MEMS) device based on a vibrating silicon membrane has been proposed as a viscosity sensor by the authors. In this paper we analyze the vibration mode of the sensor as it vibrates freely at its natural frequency. Analytical examination is compared to finite element analysis, electrical measurements and the results obtained through real-time dynamic optical surface profilometry. The vertical movement of the membrane due to the applied heat is characterized statically and dynamically. The natural vibration mode is determined to be the (1,1) mode and good correlation is found between the analytical predictions, the simulation analysis, the observed mechanical displacement and the electrical measurements.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.