Growth of Hexagonal Columnar Nanograin Structured SiC Thin Films on Silicon Substrates with Graphene–Graphitic Carbon Nanoflakes Templates from Solid Carbon Sources

Materials

Xingfang Liu¹  Guosheng Sun¹  Bin Liu¹  Guoguo Yan¹  Min Guan¹  Yang Zhang¹  Feng Zhang¹  Yu Chen²  Lin Dong¹  Liu Zheng¹  Shengbei Liu¹  Lixin Tian¹  Lei Wang¹  Wanshun Zhao¹ 

[1] Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; E-Mails:;Semiconductor Lighting Technology Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; E-Mail:

关键词: hexagonal columnar;    silicon carbide;    thin film;    graphene;    nanoflake;    solid carbon;    CVD;   

DOI  :  10.3390/ma6041543

来源: mdpi

【 摘 要 】

We report a new method for growing hexagonal columnar nanograin structured silicon carbide (SiC) thin films on silicon substrates by using graphene–graphitic carbon nanoflakes (GGNs) templates from solid carbon sources. The growth was carried out in a conventional low pressure chemical vapor deposition system (LPCVD). The GGNs are small plates with lateral sizes of around 100 nm and overlap each other, and are made up of nanosized multilayer graphene and graphitic carbon matrix (GCM). Long and straight SiC nanograins with hexagonal shapes, and with lateral sizes of around 200–400 nm are synthesized on the GGNs, which form compact SiC thin films.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.