Micromachines | |
Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow | |
Shinya Sakuma1  Masakuni Sugita2  | |
[1] Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan; | |
关键词: nanopillar; lithography; microrobot; surface-directed liquid flow; microfluidic chip; | |
DOI : 10.3390/mi4020232 | |
来源: mdpi | |
【 摘 要 】
This paper presents a novel method for fabricating nanopillar micropatterns for surface-directed liquid flows. It employs hybrid mask lithography, which uses a mask consisting of a combination of a photoresist and nanoparticles in the photolithography process. The nanopillar density is controlled by varying the weight ratio of nanoparticles in the composite mask. Hybrid mask lithography was used to fabricate a surface-directed liquid flow. The effect of the surface-directed liquid flow, which was formed by the air-liquid interface due to nanopillar micropatterns, was evaluated, and the results show that the oscillation of microparticles, when the micro-tool was actuated, was dramatically reduced by using a surface-directed liquid flow. Moreover, the target particle was manipulated individually without non-oscillating ambient particles.
【 授权许可】
CC BY
© 2013 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190035680ZK.pdf | 1175KB | download |