Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow

Micromachines

Shinya Sakuma¹  Masakuni Sugita² 

[1] Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan;

关键词: nanopillar;    lithography;    microrobot;    surface-directed liquid flow;    microfluidic chip;   

DOI  :  10.3390/mi4020232

来源: mdpi

【 摘 要 】

This paper presents a novel method for fabricating nanopillar micropatterns for surface-directed liquid flows. It employs hybrid mask lithography, which uses a mask consisting of a combination of a photoresist and nanoparticles in the photolithography process. The nanopillar density is controlled by varying the weight ratio of nanoparticles in the composite mask. Hybrid mask lithography was used to fabricate a surface-directed liquid flow. The effect of the surface-directed liquid flow, which was formed by the air-liquid interface due to nanopillar micropatterns, was evaluated, and the results show that the oscillation of microparticles, when the micro-tool was actuated, was dramatically reduced by using a surface-directed liquid flow. Moreover, the target particle was manipulated individually without non-oscillating ambient particles.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.