Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Sensors

Josef Lazar¹  Petr Klapetek²  Miroslav Valtr²  Jan Hrabina¹  Zdenek Buchta¹  Onrej Cip¹  Martin Cizek¹  Jindrich Oulehla¹ 

[1] Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic; E-Mails:;Czech Metrology Institute, Brno, Okru žní 31, Brno 638 00, Czech Republic; E-Mails:

关键词: nanometrology;    nanopositioning interferometry;    AFM;    nanoscale;   

DOI  :  10.3390/s140100877

来源: mdpi

【 摘 要 】

We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) μm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.