A Resonant Pressure Microsensor Capable of Self-Temperature Compensation

Sensors

Yinan Li¹  Junbo Wang¹  Zhenyu Luo¹  Deyong Chen¹  Jian Chen¹ 

[1] State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China; E-Mails:

关键词: pressure sensor;    resonance;    temperature self-compensation;    MEMS;   

DOI  :  10.3390/s150510048

来源: mdpi

【 摘 要 】

Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the need for additional temperature sensors. Two doubly-clamped “H” type resonant beams were arranged on the pressure diaphragm, which functions as a differential output in response to pressure changes. Based on calibration of a group of intrinsic resonant frequencies at different pressure and temperature values, the functions with inputs of two resonant frequencies and outputs of temperature and pressure under measurement were obtained and thus the disturbance of temperature variations on resonant frequency shifts was properly addressed. Before compensation, the maximal errors of the measured pressure values were over 1.5% while after compensation, the errors were less than 0.01% of the full pressure scale (temperature range of −40 °C to 70 °C and pressure range of 50 kPa to 110 kPa).

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.