Ultrathin Amorphous Carbon as Active Part of Vibrating MEMS

Proceedings

Delaunay, Marc¹  Thibert, Sébastien²  Ghis, Anne³ 

[1] Author to whom correspondence should be addressed.;INAC-Pheliqs, CEA, Univ. Grenoble Alpes, 38000 Grenoble, France;LETI, CEA, Minatec Campus, Univ. Grenoble Alpes, F38000 Grenoble, France

关键词: MEMS;    ultrasound;    membrane;    amorphous carbon;    2D material;    report;    resonance;    AFM;   

DOI  :  10.3390/proceedings2130818

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Amorphous carbon in ultra-thin thicknesses shows amazing mechanical properties that make it particularly interesting for MEMS, especially as a vibrating membrane. We present the experimental results obtained on devices comprising composite membranes of a few nanometers thick suspended above cavities of 1 to 2 μm in width. The behaviors in quasi-static mode—at low frequency—and also in resonant mode were observed and measured. Resonances frequencies of 20 MHz to 110MHz depending on the geometry were measured.

【 授权许可】

CC BY