Sensors | |
Highly Stable Liquid Metal-Based Pressure Sensor Integrated with a Microfluidic Channel | |
Taekeon Jung1  Sung Yang1  | |
[1]Department of Medical System Engineering, GIST, Gwangju 500-712, Korea | |
[2] E-Mail: | |
关键词: pressure sensor; liquid metal; galinstan; microfluidic; viscosity; | |
DOI : 10.3390/s150511823 | |
来源: mdpi | |
【 摘 要 】
Pressure measurement is considered one of the key parameters in microfluidic systems. It has been widely used in various fields, such as in biology and biomedical fields. The electrical measurement method is the most widely investigated; however, it is unsuitable for microfluidic systems because of a complicated fabrication process and difficult integration. Moreover, it is generally damaged by large deflection. This paper proposes a thin-film-based pressure sensor that is free from these limitations, using a liquid metal called galinstan. The proposed pressure sensor is easily integrated into a microfluidic system using soft lithography because galinstan exists in a liquid phase at room temperature. We investigated the characteristics of the proposed pressure sensor by calibrating for a pressure range from 0 to 230 kPa (
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190012194ZK.pdf | 2163KB | download |