Micromachines | |
Development of a Flexible Lead-Free Piezoelectric Transducer for Health Monitoring in the Space Environment | |
Marco Laurenti2  Denis Perrone2  Alessio Verna2  Candido F. Pirri2  Alessandro Chiolerio1  | |
[1] Center for Space Human Robotics, Istituto Italiano di Tecnologia, C.so Trento 21, Turin 10129, Italy | |
关键词: piezopolymeric transducer; zinc oxide; sputtering; health monitoring systems; flexible devices; space environment; | |
DOI : 10.3390/mi6111453 | |
来源: mdpi | |
【 摘 要 】
In this work we report on the fabrication process for the development of a flexible piezopolymeric transducer for health monitoring applications, based on lead-free, piezoelectric zinc oxide (ZnO) thin films. All the selected materials are compatible with the space environment and were deposited by the RF magnetron sputtering technique at room temperature, in view of preserving the total flexibility of the structures, which is an important requirement to guarantee coupling with cylindrical fuel tanks whose integrity we want to monitor. The overall transducer architecture was made of a
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190003351ZK.pdf | 3238KB | download |