The Effect of Humidity on the Stability of LTCC Pressure Sensors

Metrology and Measurement Systems

Marina Zarnik¹  Darko Belavic¹ 

关键词: Thick-film piezoresistive sensors;    capacitive pressure sensors;    offset stability;    relative humidity;   

DOI  :  10.2478/v10178-012-0012-0

来源: Versita

【 摘 要 】

LTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.

【 授权许可】

Unknown