One-step Preparation of BaTiO3 Nanoparticles by Liquid Source Chemical Vapor Deposition

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Isao Matsui¹  Manabu Shimada²  Kikuo Okuyama²  Yoshifumi Itoh²  Tae Oh Kim³ 

[1] Research and Development Center, Toshiba Co., Ltd.;Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University;School of Civil and Environmental Engineering, Kumoh National Institute of Technology

关键词: Liquid Source Precursor;    Chemical Vapor Deposition;    Nanoparticles;    Aerosol;    Barium Titanate;   

DOI  :  10.1252/jcej.37.454

来源: Maruzen Company Ltd

【 摘 要 】

References(20)Barium titanate (BaTiO3) nanoparticles were prepared by means of a liquid source chemical vapor deposition method under atmospheric pressure. The effects of precursor composition, concentration, operating temperature, and residence time in the hot zone on the surface morphology, composition, and crystallinity of the resulting particles were investigated. By increasing the Ba/Ti ratio in the precursor, the amount of TiO2 particles tended to decrease, while the amount of barium carbonate (BaCO3) particles increased. By decreasing the precursor concentration or the residence time in the hot zone, both particle size and degree of aggregation of the particles produced decreased, but the amount of barium carbonate increased. At a Ba/Ti ratio of 2.3, spherical and highly crystalline cubic BaTiO3 particles 27 nm in size with a narrow size distribution (σg = 1.33) were produced at 900°C.

【 授权许可】

Unknown