Pore Modification of Anodic Alumina Membrane by Position-Controlled CVD Using Catalytic Reaction

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Yasuyuki Egashira¹  Nobuhiko Mori¹  Yasushi Funakoshi¹  Korekazu Ueyama¹  Masahiko Matsukata¹  Takeo Minami¹ 

[1] Department of Chemical Engineering, Graduate School of Engineering Science, Osaka University

关键词: Chemical Vapor Deposition;    Catalytic Reaction;    Deposition Control;    Pore;    Membrane;   

DOI  :  10.1252/jcej.32.307

来源: Maruzen Company Ltd

【 摘 要 】

References(5)We propose a new technique, “position-controlled CVD using catalytic reaction, ” to modify pore structure. By loading the catalyst for the reverse water gas shift reaction on a support that is to be modified, we can confine the hydrolysis reaction zone to a narrow region surrounding the catalyst where H2O is generated. An anodic alumina membrane with pore size of 26 nm was used as the support. Reactant gases, H2, CO2 and TiCl4 were fed into the same side of the membrane. The effects of reaction conditions on pore modification are investigated on the basis of FE-SEM observations and permeation tests. The pore size and permeance through the membrane gradually decrease with reaction time. Deposition morphology changes with reaction conditions, such as temperature, and H2, CO2 and TiCl4 feed rates. In some cases, particles with 0.1–1 μm diameter are formed on the outer surface of membrane.

【 授权许可】

Unknown