Area-Controlled CVD Using Catalytic Reaction

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Yasuyuki Egashira¹  Nobuhiko Mori¹  Korekazu Ueyama¹  Warit Sidokmai¹ 

[1] Division of Chemical Engineering, Graduate School of Engineering Science, Osaka University

关键词: Chemical Vapor Deposition;    Catalytic Reaction;    Deposition Control;    Hydrolysis;    Titania;   

DOI  :  10.1252/jcej.32.268

来源: Maruzen Company Ltd

【 摘 要 】

References(3)Cited-By(1)In this work, deposition of TiO2 was performed as a typical case study to demonstrate the concept of area-controlled CVD process. As the reactant gases, TiCl4, H2 and CO2 were used. In this reaction system, TiO2 is deposited by the reaction of TiCl4 with H2O which is formed by the reverse water gas shift reaction. Hence, the formation and deposition zone of TiO2 was controlled by regulating the position of the catalyst of the reverse water gas shift reaction and the concentration of reactant gases.At 443–473 K, TiO2 was deposited on a inner surface of tetrafluoroethylene tube, where a certain amount of catalyst pieces were set at the close end. The deposition profile was measured with SEM. The deposition area depended on the length of the Teflon tube, the reaction temperature, the number of catalyst pieces and the concentration of reactant gases. The relationship between the deposition area and the above parameters could be interpreted by a model, which is based on an assumption that the rate-limiting step in the CVD process is TiCl4 diffusion process. It was found to be possible to control the deposition area by the proposed CVD method.

【 授权许可】

Unknown