期刊论文详细信息
Optica Applicata | |
Properties of AlNx thin films prepared by DC reactive magnetron sputtering | |
Donata Muszynska1  Andrzej Stafiniak1  Bogdan Paszkiewicz1  Sergiusz Patela1  Marek Tlaczala1  Konrad Ptasinski1  Regina Paszkiewicz1  Adam Szyszka1  | |
关键词: aluminum nitride (AlN); thin films; reactive magnetron sputtering; alternative dielectrics; | |
DOI : | |
学科分类:光谱学 | |
来源: Politechnika Wroclawska * Oficyna Wydawnicza / Wroclaw University of Technology | |