Main reaction process simulation of hydrogen gas discharge in a cold cathode electric vacuum device

Pramana

Gang Wang¹  Yuan Gao1¹  Jing-Ye Liu¹ 

[1] School of Science, Beijing University of Chemical Technology, Beijing, 100029, China$$

关键词: Plasma discharge;    reactions;    hydrogen;    collision;    process simulation.;   

DOI  :  

学科分类：物理（综合）

来源: Indian Academy of Sciences

【 摘 要 】

Based on the related theory of plasma discharge process and the COMSOL multiphysics software, and considering the corresponding boundary conditions, the related recation types in the hydrogen plasma discharge were simulated and analysed, and the main reactions of hydrogen discharge in small electric vacuum components at low pressure and weak ionization were confirmed. Among the 21 types of reactions in hydrogen discharge process, 11 of them play importnat roles under low pressure and weak ionization in cold cathode electric vacuum device. The simulated results are consistent with the test result.

【 授权许可】

Unknown