Effect of substrate roughness on growth of diamond by hot filament CVD

Bulletin of materials science

Md Motin Seikh²  S A Shivashankar⁴  S R Binu⁶  Chandrabhas Narayana⁵  S K Biswas³  L N Satapathy¹  Awadesh K Mallik⁴ 

[1] Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Ceramic Technological Institute, Bharat Heavy Electricals Limited, Bangalore 560 012, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Ceramic Technological Institute, Bharat Heavy Electricals Limited, Bangalore 560 012, India$$Ceramic Technological Institute, Bharat Heavy Electricals Limited, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Ceramic Technological Institute, Bharat Heavy Electricals Limited, Bangalore 560 012, India$$;Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Solid State and Structural Chemistry Unit, Indian Institute of Science, Bangalore 560 012, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Solid State and Structural Chemistry Unit, Indian Institute of Science, Bangalore 560 012, India$$Solid State and Structural Chemistry Unit, Indian Institute of Science, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Solid State and Structural Chemistry Unit, Indian Institute of Science, Bangalore 560 012, India$$;Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$;Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Materials Research Centre, Indian Institute of Science, Bangalore 560 012, India$$;Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560 064, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560 064, India$$Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560 064, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Jawaharlal Nehru Centre for Advanced Scientific Research, Bangalore 560 064, India$$;Central Glass and Ceramic Research Institute, Kolkata 700 032, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$Central Glass and Ceramic Research Institute, Kolkata 700 032, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, IndiaCentral Glass and Ceramic Research Institute, Kolkata 700 032, India$$Department of Mechanical Engineering, Indian Institute of Science, Bangalore 560 012, India$$

关键词: Hot filament CVD;    polycrystalline diamond coating;    roughness;    morphology;    quality.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Polycrystalline diamond coatings are grown on Si (100) substrate by hot filament CVD technique. We investigate here the effect of substrate roughening on the substrate temperature and methane concentration required to maintain high quality, high growth rate and faceted morphology of the diamond coatings. It has been shown that as we increase the substrate roughness from 0.05 𝜇m to 0.91 𝜇m (centre line average or CLA) there is enhancement in deposited film quality (Raman peak intensity ratio of 𝑠ð�?��?³ to non-𝑠ð�?��?³ content increases from 1.65 to 7.13) and the substrate temperature can be brought down to 640°C without any additional substrate heating. The coatings grown at adverse conditions for 𝑠ð�?��?³ deposition has cauliflower morphology with nanocrystalline grains and coatings grown under favourable 𝑠ð�?��?³ condition gives clear faceted grains.

【 授权许可】

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