Low-energy electron microscopy studies of interlayer mass transport kinetics on TiN(111)

SURFACE SCIENCE

卷:560

Article

Kodambaka, S ; Israeli, N ; Bareño, J ; Swiech, W ; Ohmori, K ; Petrov, I ; Greene, JE

关键词: surface diffusion;    surface thermodynamics (including phase transitions);    low-energy electron microscopy (LEEM);    models of surface kinetics;    single crystal surfaces;    surface structure;    morphology;    roughness;    and topography;   

DOI  :  10.1016/j.susc.2004.05.005

来源: Elsevier

【 摘 要 】

In situ low-energy electron microscopy was used to study interlayer mass transport kinetics during annealing of three-dimensional (3D) TiN(1 1 1) mounds, consisting of stacked 2D islands, at temperatures T between 1550 and 1700 K. At each T, the islands decay at a constant rate, irrespective of their initial position in the mounds, indicating that mass is not conserved locally. From temperature-dependent island decay rates, we obtain an activation energy of 2.8 +/- 0.3 eV. This is consistent with the detachment-limited decay of 2D TiN islands on atomically flat TiN(1 1 1) terraces [Phys. Rev. Lett. 89 (2002) 176102], but significantly smaller than the value, 4.5 +/- 0.2 eV, obtained for bulk-diffusion-limited spiral step growth [Nature 429 (2004) 49]. We model the process based upon step flow, while accounting for step-step interactions, step permeability, and bulk mass transport. The results show that TIN(1 1 1) steps are highly permeable and exhibit strong repulsive temperature-dependent step-step interactions that vary between 0.03 and 0.76 eV (.) Angstrom. The rate-limiting process controlling TiN(1 1 1) mound decay is surface, rather than bulk, diffusion in the detachment-limited regime. (C) 2004 Elsevier B.V. All rights reserved.

【 授权许可】

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