Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

Bulletin of materials science

M K Jayaraj¹  Manoj Ramachandran¹  Aldrin Antony¹ 

[1] Department of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$Department of Physics, Cochin University of Science and Technology, Kochi 682 022, IndiaDepartment of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$

关键词: Transparent conductors;    ZnO thin films;    photovoltaics.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm^�??1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.

【 授权许可】

Unknown