期刊论文详细信息
Bulletin of materials science
Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering
M K Jayaraj1  Manoj Ramachandran1  Aldrin Antony1 
[1] Department of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$Department of Physics, Cochin University of Science and Technology, Kochi 682 022, IndiaDepartment of Physics, Cochin University of Science and Technology, Kochi 682 022, India$$
关键词: Transparent conductors;    ZnO thin films;    photovoltaics.;   
DOI  :  
学科分类:材料工程
来源: Indian Academy of Sciences
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【 摘 要 】

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm�??1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.

【 授权许可】

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