Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering

Bulletin of Materials Science

关键词: Transparent conductors;    ZnO thin films;    photovoltaics.;   

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm–1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.

【 授权许可】

CC BY