期刊论文详细信息
Bulletin of Materials Science
Transparent conducting zinc oxide thin film prepared by off-axis rf magnetron sputtering
关键词: Transparent conductors;    ZnO thin films;    photovoltaics.;   
学科分类:材料工程
来源: Indian Academy of Sciences
PDF
【 摘 要 】

Highly conducting and transparent ZnO : Al thin films were grown by off-axis rf magnetron sputtering on amorphous silica substrates without any post-deposition annealing. The electrical and optical properties of the films deposited at various substrate temperatures and target to substrate distances were investigated in detail. Optimized ZnO : Al films have conductivity of 2200 S cm–1 and average transmission in the visible range is higher than 85%. The conductivity and mobility show very little temperature dependence.

【 授权许可】

CC BY   

【 预 览 】
附件列表
Files Size Format View
RO201902185515588ZK.pdf 137KB PDF download
  文献评价指标  
  下载次数:6次 浏览次数:8次