Silicon Membranes for Smart Silicon Sensors .

Defence Science Journal

S. K. Lahiri¹  S. Das¹  S. Kal¹ 

[1] Indian Institute of Technology Kharagpur, Kharagpur

关键词: Microelectromechanical sensors;    Infrared detector;    Anisotropic etching;    Microsensors;   

DOI  :  

学科分类：社会科学、人文和艺术（综合）

来源: Defence Scientific Information & Documentation Centre

【 摘 要 】

The development of smart Si sensors whichcombine active circuitry and sensor on the same chip, has drawnattention in terms of miniaturisation and cost-effectiveness ofmicrosensors. Interest in micromachining of Si to fabricate membranesderives from the need for inexpensive and more versatile sensors. Thispaper reports the results on fabrication of Si membranes by anisotropicetching of Si in EDP solution. Good quality membranes of 10 Nanometerthickness were fabricated. Infrared detector based on thermopilestructure was realised on 50 Nanometer thick Si membrane usingpolysilicon and Al junctions. Thermo-emf generated at 150 °c is nearly 8mv.

【 授权许可】

Unknown