Microscopic TV Holography for Microsystems Metrology

Defence Science Journal

M. P. Kothiyal¹  Upputuri Paul Kumar¹  U. Somasundaram¹  Nandigana Krishna Mohan¹ 

[1] Indian Institute of Technology Madras, Chennai

关键词: TV holography and Interferometry;    Microsystems;    Metrology;   

DOI  :  

学科分类：社会科学、人文和艺术（综合）

来源: Defence Scientific Information & Documentation Centre

【 摘 要 】

Normal 0 false false false MicrosoftInternetExplorer4 The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-contact quantitative measurement system for the characterization of their performance, reliability and integrity. A TV holographic system with long working distance microscope is developed for the static, dynamic and 3-D surface profile characterization of Microsystems. The system can be operated either incontinuousorstroboscopicillumination mode of operation. In this paper we present the development of a microscopic imaging system and its applicationsforMicrosystems Metrology. Defence Science Journal, 2011, 61(5), pp.491-498 , DOI:http://dx.doi.org/10.14429/dsj.61.908Normal 0 false false false MicrosoftInternetExplorer4  

【 授权许可】

Unknown