Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate

IEICE Electronics Express

O. Sidek¹  Asrulnizam Abd Manaf¹  I. H. Hamzah¹ 

[1] School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus

关键词: PGMEA;    PMMA;    SU8-10;    grayscale;    resolution;   

DOI  :  10.1587/elex.6.1726

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(10)Silicon or glass was a common material for SU8 coating. However, these materials are hard and brittle, make it difficult for drilling and dicing. This paper reported the effect of grayscale and resolution based on the various length of time for Propylene Glycol Methyl Ether Acetate (PGMEA) developing towards SU8-10 coated on polymethylmethacrylate (PMMA). The grayscale results show that the 0% (solid black) produced the highest percentage on the square structure formed to the SU8-10 film coated on PMMA and the highest resolution had been produced for the 30 minutes of PGMEA developing.

【 授权许可】

Unknown