SU-8 Photolithography as a Toolbox for Carbon MEMS

Micromachines

关键词: dielectrophoresis;    micromolding;    pyrolysis;    epoxy;    shrinkage;    tapered;    polymer substrate;    grayscale;    high aspect ratio;    microfluidics;   

DOI  :  10.3390/mi5030766

来源: mdpi

【 摘 要 】

The use of SU-8 as precursor for glass-like carbon, or glassy carbon, is presented here. SU-8 carbonizes when subject to high temperature under inert atmosphere. Although epoxy-based precursors can be patterned in a variety of ways, photolithography is chosen due to its resolution and reproducibility. Here, a number of improvements to traditional photolithography are introduced to increase the versatility of the process. The shrinkage of SU-8 during carbonization is then detailed as one of the guidelines necessary to design carbon patterns. A couple of applications—(1) carbon-electrode dielectrophoresis for bioparticle manipulation; and (2) the use of carbon structures as micro-molds are also presented.

【 授权许可】

CC BY   
© 2014 by the author; licensee MDPI, Basel, Switzerland.