A linear model based noise evaluation of a capacitive servo-accelerometer fabricated by MEMS

IEICE Electronics Express

Hiroaki Niitsuma¹  Hiroshi Asanuma¹  Hideaki Kakuma²  Yusaku Yoshida² 

[1] Graduate School of Environmental Studies, Tohoku University;Device Technology Development Department, Kawasaki Research and Development Center, Mitutoyo Corporation

关键词: MEMS accelerometer;    noise;    linear model;   

DOI  :  10.1587/elex.2.198

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(5)Cited-By(6)The noise characterization of a capacitive servo-accelerometer using a linear model is presented in this paper. The input reference noise of electronic circuit is expressed as a capacitive variation and it is introduced to a linear model for frequency response, separately with the thermal mechanical noise. The simulated noise was generally found to conform to the measured noise in the experiment, suggesting that the model can be effectively used for noise evaluation of accelerometers fabricated in a similar fashion.

【 授权许可】

Unknown