Three-axis MEMS Accelerometer for Structural Inspection

3rd All-Russian Scientific and Practical Conference on Innovations in Non-Destructive Testing

Barbin, E.^1 ; Koleda, A.^1 ; Nesterenko, T.^1 ; Vtorushin, S.^1

Tomsk Polytechnic University, Tomsk, Russia^1

关键词: Ansys multiphysics;    MATLAB /simulink;    Measurements of;    MEMS accelerometer;    Microelectromechanical system accelerometers;    Moving objects;    Structural inspections;    Three-axis;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/671/1/012003/pdf
DOI  :  10.1088/1742-6596/671/1/012003

来源: IOP

【 摘 要 】

Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB/Simulink tools for modeling nonlinear dynamic systems.