Low-Frequency Piezoelectric Accelerometer Array for Fully Implantable Cochlear Implants

Proceedings

Peter, Lucky Kenda¹  Soleimani, Saeedeh²  Udvardi, Péter³  Radó, János⁴  Bársony, István⁵ 

[1] Author to whom correspondence should be addressed.;Department of Otorhinolaryngology-Head and Neck Surgery, Clinical Center, University of Pécs, H-7601 Pécs, Hungary;Doctoral School on Materials Sciences and Technologies, Óbudai University, H-1034 Budapest, Hungary;Institute of Technical Physics and Materials Science, Centre for Energy Research, HAS, H-1121 Budapest, Hungary;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: cochlear implant;    MEMS accelerometer;    piezoelectric sensor;    energy harvester;    low-frequency device;    Archimedean;    Fermat spiral;    aluminum-nitride (AlN);   

DOI  :  10.3390/proceedings2131059

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We demonstrate a low-volume, stress-free, piezoelectric micro-electromechanical system (MEMS) cantilever array for fully implantable hearing aids. The 12-element spiral-matrix is sensitive to the lower part of audible frequency range (300–700 Hz) through the proper resonant frequency of the individual spirals tuned by dimensions of the cantilevers. The obtained high Q-factors (117–254) provide high frequency selectivity. The generated open circuit voltage signals could be sufficient for the direct analog conversion of the signals for cochlear multielectrode implants. By comparing different geometries we have also demonstrated that the initial stress, which is derived from silicon-dioxide (SiO2) and aluminum-nitride (AlN) layers, could be drastically reduced simply by the spiral geometry. The results of vibration measurements have shown a good agreement with the calculated resonant frequencies.

【 授权许可】

CC BY