BaxSr1-xTiO3 NANOCRYSTALLINE THIN FILMS DEPOSITIONGROUNDED IN RF MAGNETRON CO-SPUTTERING

Digest Journal of Nanomaterials and Biostructures

J. Reséndiz-Muñoz¹ 

关键词: Sputtering deposition;    thin films;    stoichiometric behavior;    Barium Strontium;    Titanate;    Boltzmann’s equation;   

DOI  :  

学科分类：生物技术

来源: Institute of Materials Physics

【 摘 要 】

A solid solution of barium-strontium titanate BaxSr1-xTiO3 was deposited in thin films byRF reactive co-sputtering for x values within 0 ≤ x ≤ 1. The films composition wascontrolled through applied RF power to BaTiO3 and SrTiO3 targets. The Ba and Srcontents in thin films is characterized through x values as a function of applied RF powershowing a good concordance, within the experimental error, with a kinetic descriptionbased on a molecular free path mean sputtering process. The elemental composition of thefilms was obtained considering the electron dispersion spectroscopy, and the x valueinferred through the change of the (110) lattice inter-planar spacing. This one was obtainedfrom the peak position in the x-ray diffraction (XRD) patterns by BSTO films. Theaverage crystal size for the whole composition is around 20 nm, obtained from XRD dataanalysis.

【 授权许可】

Unknown