Digest Journal of Nanomaterials and Biostructures | |
BaxSr1-xTiO3 NANOCRYSTALLINE THIN FILMS DEPOSITIONGROUNDED IN RF MAGNETRON CO-SPUTTERING | |
J. Reséndiz-Muñoz1  | |
关键词: Sputtering deposition; thin films; stoichiometric behavior; Barium Strontium; Titanate; Boltzmann’s equation; | |
DOI : | |
学科分类:生物技术 | |
来源: Institute of Materials Physics | |
【 摘 要 】
A solid solution of barium-strontium titanate BaxSr1-xTiO3 was deposited in thin films byRF reactive co-sputtering for x values within 0 ≤ x ≤ 1. The films composition wascontrolled through applied RF power to BaTiO3 and SrTiO3 targets. The Ba and Srcontents in thin films is characterized through x values as a function of applied RF powershowing a good concordance, within the experimental error, with a kinetic descriptionbased on a molecular free path mean sputtering process. The elemental composition of thefilms was obtained considering the electron dispersion spectroscopy, and the x valueinferred through the change of the (110) lattice inter-planar spacing. This one was obtainedfrom the peak position in the x-ray diffraction (XRD) patterns by BSTO films. Theaverage crystal size for the whole composition is around 20 nm, obtained from XRD dataanalysis.
【 授权许可】
Unknown
【 预 览 】
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